Define metrology. Relate metrology to device size and length scales in integrated circuits. Research metrology via microscopy in the integrated circuit industry. What techniques are used and why? Give references for your work. Write a 1-2 page summary on this topic. You can include illustrations. I decided that the “extra” items for the midterm would be to specify that the metrology paper to include: Cover page – make sure you include your name and your area of engineering. Technical description – 2 page maximum. This should be a technical summery in your own words, with references to the figures, and include appropriate references to your sources of information. Illustrations (Figures) – 1 page maximum. The figures that you choose should complement your technical description and be referred to as part of the text. Unless you create your own figure, the content of your illustrations should be properly referenced. They should include a brief caption. Sources – References – no page limit, but 1 page should do. Your references should be referred to in the technical description text as appropriate. The sequence of the sources should reflect how they appear in the technical description text. For example, the first source you use in your technical description should be your first listed source. Your technical description and figures should include one specific example of how metrology is applicable in engineering. Your example may reflect you area of engineering.